【摘要】 利用有限元方法 ,研究振子框架式微机械陀螺主要几何尺寸对其固有频率的影响。根据陀螺驱动模态频率和检测模态的频率匹配 ,优化了陀螺的结构尺寸 ,并为结构改进和制备工艺提供理论指导。更多还原

【Abstract】 A novel micromachined comb gimbal gyroscope is presented, which will be excited by electrostatic forces and the coriolis acceleration induced torsion motion will be read out capacitively. Since electrostatic comb driving and DRIE (deep reactive ion etching) technology are adopted, large driving amplitude can be achieved and sensitivity of gyroscope can be increased. The effect of primary structural dimensions on natural frequency of comb gimbal micromachined gyroscope is studied using finite element method (FEM) analysis. According to matching of driving mode frequency and detection mode frequency, the structure dimensions of gyroscope are optimized, which provides help for fabrication process.更多还原