【摘要】 对薄膜力学性能的测试方法、技术以及所取得的主要成果进行简要的综合介绍更多还原

【Abstract】 The present work summarizes the novel experimental methods recently developed to characterize the mechanical properties of thin films. These methods include the nanoindentation test, the indentation fracture technique, the micro rotating structure indicator, the bending test of microcantilever beams, the microbridge test, and the bulge test. The features and merits of these experimental methods are described in detail. The mechanical properties of thin films, such as residual stresses, Young’s modulus, fracture strength, hardness, and etc, characterized by these methods are also briefly introduced.更多还原