【摘要】 用 Ｘ射线光电子能谱（ＸＰＳ）和小掠射角Ｘ射线衍射（ＧＡＸＲＤ）研究了铝合金 ＬＹ１２等离子体基离子注入 Ｎ＋ 原位注入 Ｃ形成ＡｌＮ／ＤＬＣ（类金刚石碳膜）改性层的成分分布及相结构，用激光 Ｒａｍａｎ光谱分析了表面单一碳层的结构，对 过渡层元素进行了 Ｇａｕｓｓｉａｎ—Ｌｏｒｅｎｔｚｉｏｎ峰位拟合分析．结果表明，Ｎ浓度在注入层呈Ｇａｕｓｓ分布，Ｃ浓度沿注入方向逐 渐减小．Ｃ的注入使 Ｎ分布有所拓宽．Ｃ在表面还能形成一层单一稳定的 ４００ ｎｍ厚的 ＤＬＣ膜．过渡层主要由 Ａｌ４Ｃ３， Ａｌ２Ｏ３，ＡｌＮ，β－Ｃ３Ｎ４等组成．改性层总厚度达 ８００ｎｍ．更多还原

【Abstract】 The AlN/DLC (diamond kike carbon) layer of aluminum alloy LY12 implanted with N+in - situ implanted with C by plasma based ion implantation (PBII) was characterized using X- ray photoelectron spectroscopy (XPS) and glancing angle X-ray diffraction (GAXRD).The formed single carbon-layer on the surface was analyzed with laser raman spectrum, and the transition layer of AlN/DLC was analyzed using gaussian-distribution fitting criterion. The results show that the depth profile of N in the implanted layer is like Gaussian-distribution, and that of C decreases gradually along the implanted direction. Implanting C makes the depth profile of N broaden. Simultaneously, carbon shows obvious deposited effect so that a 400 nm-thick steady diamond-like carbon (DLC) film was formed on the surface. The transition layer consists of Al4C3, Al2O3, AlN, β-C3N4 and other phases. The modified layer can reach 800 nm thickness.更多还原