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Sol-Gel V2O5薄膜的成膜和取向研究
The Investigation of Growth of Sol-Gel V2O5 Films
【摘要】 采用溶胶 -凝胶法在SiO2 /Si衬底上沉积V2 O5薄膜 ,详细介绍了对衬底表面作亲水处理的方法。以不同浓度溶胶 ,在不同温度和不同气氛下对薄膜进行热处理 ,得到以〈0 0 1〉向为主取向的高取向薄膜 ,从理论上解释了V2 O5薄膜的取向机理 ,并与相同衬底上的热蒸发和PLD氧化钒薄膜的取向作了比较
【Abstract】 Highly orientated <001> V 2O 5 thin film was formed by Sol-Gel method on SiO 2/Si substrate. To prepare V 2O 5 film on SiO 2/Si substrate, the substrate was boiled in the solution of NH 3∶H 2O 2∶H 2O=3∶3∶10 for hydrophilic treatment. The different orientation of vanadium oxide films grown by Sol-Gel, evaporation and Pulsed Laser Deposition (PLD) methods was compared.
【基金】 中科院上海冶金所离子束开放实验室资助
- 【文献出处】 江苏石油化工学院学报 ,Journal of Jiangsu Institute of Petrochemical Technology , 编辑部邮箱 ,2001年04期
- 【分类号】O484.4;O484.42
- 【被引频次】5
- 【下载频次】154