【摘要】 介绍了一种利用衍射方法测试CD R光盘盘基槽深和槽宽均匀性的方法。CD R光盘盘基槽深和槽宽均匀性的测试对于CD R光盘的制造非常重要 ,它可反映出母盘涂胶、刻录、显影、金属化、电铸及盘基复制的质量。尽管它不能精确测试沟槽的形状 ,但在测试均匀性时却显得简单、可靠、灵敏、快速和无损。同时给出同一盘基用衍射方法和原子力显微镜方法的测试结果更多还原

【Abstract】 In this paper, a testing system for groove geometry of CD R substrates by measuring diffraction orders is introduced. This testing is of particular importance in CD R disc manufacture process because the results fed back from the testing can be used to help optimize recording, developing, metalizing, electroplating and replicating processes. Even if the width and depth of groove are not accurately obtained by this system, it is also valuable in CD R disc manufacturing process because the system, which can be used to judge the quality of substrates, is simple, sensitive, quick and non destructive. The results of a same sample tested by our system and an AFM microscope are presented simultaneously.更多还原