【摘要】 运用 1 0 6 4μm连续输出的Nd∶YAG激光器 ,对与InP晶格匹配的InGaAsP四元系量子阱材料进行了光子吸收诱导无序 (PAID)技术的研究。通过光荧光谱 (PL)的测量 ,证明有量子阱混合现象产生。衬底预加热和聚焦激光束结果表明 ,PAID中辐照时间与衬底温度、辐照的平均功率密度密切相关。聚焦激光照射后的荧光双峰表明PAID有一定的定域处理能力。更多还原

【Abstract】 The photoabsoption induced disordering (PAID) on lattice matched InGaAsP quaternary quantum wells is investigated using cw 1064 nm Nd∶YAG laser. Quantum wells intermixing (QWI) is demonstrated by photoluminescent (PL) spectrum. The process time could be reduced by heating the sample in advance or focusing the laser beam. Two peaks of PL show that PAID technique could be used for processing the quantum wells locally on the wafer.更多还原