【摘要】 提出了一种提高极值法监控薄膜淀积层厚精度的方法。该监控方法通过改变各层膜的反射率极值过正量而将被镀膜层精确地停镀于其膜厚的设计值。这一方法既可提高淀积规整膜系时的层厚监控精度 ,也可提高淀积非规整膜系时的层厚监控精度。更多还原

【Abstract】 A monitoring method, which can improve the precision of the turning point monitoring approach,is proposed in the paper. This method stops depositing each layer of a film at the point which has different reflectance extreme overshoot so that the structure of the deposited film is similar to the design. It can improve the monitoring precision of a coating with quarterwave or non-quarterwave optical thickness layers.更多还原