【摘要】 分析了监控光带宽对薄膜淀积时膜厚极值点的影响 ,建立了模拟薄膜实际淀积过程的计算机模拟程序 ,通过对几种窄带滤光片膜系结构的模拟分析 ,得到了这些膜系对监控光带宽的基本要求更多还原

【Abstract】 The influence of the monitoring light′s bandwidth on the film thickness at the turning point is studied. A program which takes into account such influences is developed to simulate the deposition process of narrow bandwidth filter. Several filters are simulated with the program. A conclusion that monitoring light′s bandwidth influences the coating of narrow bandwidth filter heavily and that one third of the filter′s bandwidth is necessary to get an acceptable pass band curve is reached.更多还原