【摘要】 环境振动使干涉测量技术的应用受到制约 ,自适应抗振干涉术是当前消除干涉仪受外界振动影响的有效方法 ,也是国际上正在研究的热门课题。文中研讨并总结了国际上在这个方面的最新研究成果 ,并对各种方法的优缺点进行了比较。更多还原

【Abstract】 External vibration can cause error in surface measurement and if it is severe enough the fringes will be completely washed out. Adaptive control to compensate the effects of vibration is an effective method to eliminate external disturbance. In this article, the latest developed methods of adaptive vibration\|compensated interferometry are introduced and discussed. \;更多还原