【摘要】 对 PVD沉积 Pb1 - x Gex Te薄膜研究发现 Pb1 - x Gex Te是一种高性能的红外材料 ,在 3～ 2 5μm光谱范围具有较好的透光性能 ,室温下的折射率为 4.8～ 5 .6 .薄膜的光学性质 ,包括透射率、色散关系以及折射率的温度系数dn/ d T,与材料中组分 x、环境温度和薄膜的沉积工艺条件有密切关系 .适当地改变组分和工艺条件 ,可以使薄膜的折射率温度系数 dn/ d T从负变到零并转为正 ,这对于制备高温度稳定性的红外光学薄膜器件具有重要的意义更多还原

【Abstract】 Study of Pb 1- x Ge x Te films deposited by PVD revealed that Pb 1- x Ge x Te is a kind of fine characteristic infrared materials, which has a high transmission in the spectral range 3~25μm, and has indices of refraction in the range 4.8~5.6 at room temperature. Optical properties, which include transmission spectrum, dispersion spectrum and temperature coefficient d n /d T of refractive index, depend strongly on content x , environmental temperature and deposition conditions. It can be found that proper change of content x and deposition conditions may result in the change of temperature coefficient d n /d T of refractive index from negative to zero, and to positive from zero, which is of significance for manufacturing highly stable infrared optical filters.更多还原