【摘要】 提出了一种新型可以测量孔和轴直径的超精密测量仪，该超精密测径仪主要由炫耀光栅和气浮导轨及红宝石探头组成，采用接触式绝对测量方法。介绍了环境温度的控制和减小环境振动的手段，以保证测量的精度和重复性。这种新型测径系统分辨率可以达到1nm,量程范围可达 0～100mm。更多还原

【Abstract】 A novel instrument that can attain ultra-precision accuracy for measuring diameter of both orifice and axis is presented in this paper. The instrument is based on a combination of blazed grating, air-lubricated hydrostatic slide guide and ruby probe and touch absolute measurement method, in which the way to control testing temperature and vibration is adopted to ensure the ultra-precision accuracy and high measurement repeatability. As a result, it is obtained that the system resolution is up to1nm and the measurement range 0～100mm.更多还原