【摘要】 从多层膜和多层膜光栅的衍射特性出发，得到了适用于软Ｘ射线波段的组合式多层膜－多层膜光栅单色器的工作原理和色散性质。如果多层膜和多层膜光栅的反射面之间保持适当的夹角，该夹角取决于多层膜的周期和光栅的周期之比，则由单色器出射的光束仍保持与入射光束平行，且有很好的色散及最大的光强输出。更多还原

【Abstract】 The diffuse properties and combination methods of monochromator by combined multilayer multilayergrating in soft X - ray region were deduced on the basis of diffraction properties of multilayers and multilayer - gratings. If there is an appropriate angle, which is determined by the periods of the elements between reflection faces of multilayer and multilayer - gratings, the monochromator can afford higher resolution homogeneous light beam which is parallel to incident rays.更多还原