【摘要】 在正弦相位调制半导体激光干涉仪中 ,半导体激光波长随注入电流和温度漂移而产生相位测量误差 ,同时干涉仪的机械振动和干涉仪两臂中的空气扰动也会引入相位误差。在已有光热正弦相位调制干涉仪中引入反馈机制 ,有效地降低了上述误差 ,增强了干涉仪的抗干扰能力。使用此干涉仪测量了物体的位移 ,测量结果表明这种方法可以有效地提高相位的测量精度更多还原

【Abstract】 A photothermal modulation laser diode interferometer that is insensitive to external disturbances such as fluctuations in the wavelength of the laser diode and mechanical vibrations of the optical components is proposed. A feedback control system is designed to control the wavelength of the light source and reduce the phase measurement errors of interference signal. The measured results show the usefulness of the interferometer.更多还原