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原子力显微镜对TeO_x薄膜中短波长静态记录点结构的分析

Atomic Force Microscope Study of the Structure of Short-Wavelength Laser Static Recording Bits in TeO_x Thin Film

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【作者】 李青会; 孙洁林; 王海凤; 干福熹;

【Author】 Li Qinghui Sun Jielin Wang Haifeng Gan Fuxi (Shanghai Institute of Optics and Fine Mechanics, The Chinese Academy of Sciences, Shanghai 201800)

【机构】 中国科学院上海光学精密机械研究所; 中国科学院上海光学精密机械研究所 上海201800; 上海201800; 上海201800;

【摘要】 以真空蒸镀法在K9基底上制备了TeOx 单层薄膜。采用特定的定位方法 ,使用原子力显微镜对不同记录功率下薄膜中短波长静态记录点 (5 14.5nm)的结构进行了分析。实验结果表明薄膜具有良好的记录灵敏性 ,在记录功率 1.5mW时就可产生较高的反射率对比度。记录点具有明显的凹陷和凸起结构 ,随着记录功率的提高 ,凹陷和凸起增强 ,记录点增大。记录点的形态结构和记录前后反射率对比度是直接相关的。研究揭示了原子力显微镜在提高薄膜存储特性如信噪比、存储密度等方面的分析功能。

【Abstract】 Monolayer TeO x thin film was deposited on K 9 glass substrates by vacuum evaporation. By adopting a specific locating method, atomic force microscope (AFM)could be used to analysis the structure of short wavelength laser static recording bits, which were recorded at different writing powers in TeO x thin film. It was found that the film had good writing sensitivity, the reflectivity contrast could reach to a high value at writing power 1.5 mW. The bits were characterized by obvious hollows and mounds. With the increase of writing power, the height of hollow and mound increased, so did the length of the recording bits. The present setup allows the correlation of the change in reflectivity contrast caused by a specific laser pulse to the bit topography. This establishes the use of the analytical power of AFM for dedicated efforts in improving the performance, e.g., signal to noise ratio and storage density of optical storage media.

【基金】 国家自然科学基金 (5 9832 0 6 0 )
  • 【文献出处】 光学学报 ,Acta Optica Sinica , 编辑部邮箱 ,2001年10期
  • 【分类号】O484.5
  • 【被引频次】6
  • 【下载频次】53
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