【摘要】 用X射线运动学理论对软X射线多层膜光栅的衍射特性进行了研究。发现其衍射规律与多层膜的布拉格衍射和普通光栅衍射有本质的区别 ,可将衍射能量集中于某一衍射级上 ,同时它又保持了多层膜的高反射率和光栅的高分辨本领等优良特性更多还原

【Abstract】 The main diffraction properties of a soft X ray optical component--multilayer gratings are deduced and discussed in detail on the basis of X ray kinematics. Results show that main energy of diffraction light can be concentrated in one order and resolving power and reflection of multilayer grating are higher. There is essential difference between the dispersive properties of multilayer gratings and multilayers.更多还原