【摘要】 通过对共焦三维形貌检测术的分析 ,根据超分辨理论 ,在共焦系统中加入环形光瞳滤波器 ,以期延长系统的动态检测范围 ,并提高系统的横向分辨率。理论和实验结果表明该方法在适当牺牲轴向分辨率的条件下 ,能有效地延长系统的动态检测范围 ,且提高其横向分辨率更多还原

【Abstract】 Based on super\|resolution theory, the 3\|D confocal surface profilometry and annular pupil filter are combined for analyzing the property of the 3\|D profilometry. The results of computer simulation and experiment prove that this method can explore the axial dynamic range and improve transversal resolution of 3\|D profilometry at decreasing axial resolution.更多还原