【摘要】 在光纤共焦扫描显微镜 (FOCSM)的基础上 ,利用其轴向响应曲线的线性部分 ,给出了一种测定物体微位移的新方法。并用该方法精确测量了压电陶瓷微小的逆压电伸缩效应 ,分辨率可以达到 5nm。更多还原

【Abstract】 By utilizing the axial response curve of fiber optical confocal scanning microscope, a new technique for measuring the micro position has been developed. Using this technique, the converse piezoelectric expend and contract of PZT with resolution as high as 5 nm was measured.更多还原