【摘要】 介绍了精密角度传感器和不使用任何精密参考仪器的角度传感器的自标定方法。采用补偿技术制作了一对角度传感器 ,可以克服光源热漂移带来的影响 ,并进行了标定。两个角度传感器的测量范围为 180″,分辨率分别为 0 .0 0 3″,0 .0 0 4″。平均灵敏度标定的重复性误差为 0 .0 15 % ,线性误差的标定重复性误差为 0 .0 15″。更多还原

【Abstract】 A high precision angle sensor and a new method for calibrating precision angle sensor absolutely without any accurate reference instruments are described. Two angle sensors with compensate devices which compensating thermal drift of the light source are developed and calibrated by themselves. The measurement ranges of two angle sensors are 180″, and the resolutions of two angle sensors are 0.003″ and 0.004″, respectively. The repeatability error of the evaluated mean sensitivity was improved to 0.015% by compensating device. The repeatability of the calibrated linearity error was reduced to 0.015″.更多还原