【摘要】 对于大口径精密投影光刻制版镜头来说 ,透镜的应力变形和中心误差对整个系统的成像质量有较大影响。详细介绍了一种减小应力变形的特殊结构和在一种光学装校过程中多镜组整体对接的方法 ,给出了对接前后的偏心测量数据以及镜头实际曝光的图形。更多还原

【Abstract】 For big aperture′s precision photolithographic plate-making lenses, the stress distortion and centering errors of lenses can make a bad effect on imaging quality. A special configuration reducing stress distortion and a method for integral coupling of multi-lenses connecting in the processing of optical assembly and rectification are given in detail. The testing data before and after coupling and the exposure pattern of the lens are presented.更多还原