【摘要】 变栅距衍射光栅 (VLS)在像差校正等方面具有突出优点 ,采用不同的栅距变化规律的变栅距光栅具有不同的光谱特性 ,因而在众多的高技术领域获得了广泛应用。本文从VLS的像差校正原理出发 ,较全面地阐述了VLS在真空紫外和软X射线、高分辨率光电探测器、表面干涉计量以及光纤通讯等领域的应用 ,并针对其技术特点指出了它的发展趋势。更多还原

【Abstract】 Varied line space gratings(VLS) have great advantages in aberration correction,and the different spectral properties will be gained using the VLS with different rules of spacing. In this paper, the aberration correction principles of the gratings and their applications in the areas of vacuum ultraviolet, soft X ray, high resolution photoelectric detectors, surface metrology and optical fiber communication is described. Finally, the potential of the gratings in the future is discussed.更多还原