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基体表面粗糙度对磁控溅射TiN涂层界面结合力的影响

Effect of Surface Roughness on Boundary Adhesion of Magnetic Sputtered TiN Coating

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【作者】 韦习成李健袁成清

【Author】 WEI Xi cheng 1, LI Jian 2, YUAN Cheng qing 2 (1 Shanghai University, Shanghai 200072, China; 2 Wuhan Research Institute of Materials Protection, Wuhan 430030, China)

【机构】 上海大学材料科学与工程学院!上海200072武汉材料保护研究所!湖北武汉430030

【摘要】 利用球与平面的赫兹接触应力分布的经验修正公式[1] ,对磁控溅处理前的基体表面粗糙度对沉积层和基体的界面结合力进行了研究 ,并和其他涂层界面结合力的测量方法进行了比较。结果表明 :基体表面粗糙度对界面结合力有很大影响 ,表面粗糙度的改善有利于 Ti N层 /基体的界面结合力的提高 ,同时改善了 Ti N层的摩擦学性能

【Abstract】 The boundary adhesion strength of magnetic sputtered TiN coatings on GCr15 steel substrates with different surface roughness was studied employing the revised Hertz contact stress formulas based on ball/plane [1] The measured and calculated data were compared with those got by other methods The results showed that the surface roughness of substrate influenced greatly the adhesion of TiN coating deposited by magnetic sputtering deposition process Improving the surface roughness of substrate is beneficial to increasing the adhesion of TiN coating, and then to improving its tribological property This study is important in advising the practical application of TiN coating

【关键词】 表面粗糙度界面结合力TiN赫兹接触
【Key words】 suface roughnessboundary adhesionTiNhertzian contact
【基金】 机械工业技术发展基金资助项目!(95 JA0 5 0 2 )
  • 【文献出处】 机械工程材料 ,Materials For Mechanical Engineering , 编辑部邮箱 ,2001年01期
  • 【分类号】TG174.44
  • 【被引频次】40
  • 【下载频次】941
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