【摘要】 本文测量了氮气、氨气及其混合气体的快脉冲放电等离子体的光谱 ,用光谱分析方法研究了等离子体成分及其与气压和配比的关系 ,并讨论了在制备氮化物时使用氮、氨混合气体的有利之处。更多还原

【Abstract】 The emission spectra from the pulsed discharge plasma of nitrogen,ammonia or their mixture were measured.In the discharge of pure nitrogen gas,as the pressure increased,the discharge volume decreased and more dissociation of nitrogen molecules occurred due to the higher energy density.In the discharge of ammonia,N,N + and NH + were observed,but no NH 2 and NH 3 were detected,indicating that ammonia,which has the lower dissociation and ionization energies as compared to nitrogen,was highly dissociated.The discharge of the mixture of N 2 and NH 3 was also studied.The dependence of the dissociation of nitrogen on the ratio of nitrogen to ammonia was investigated by emission spectra.The optimal ratio for nitrogen dissociation was obtained.The advantage of using the mixture of nitrogen and ammonia in the synthesis of nitrides was discussed.更多还原