【摘要】 报道了对多孔硅在NiCl2 中电解钝化处理的一种新方法。观测了经不同时间处理后多孔硅的光致发光谱 ,其光谱表明 ,恰当的处理条件 ,可使峰值强度增大约 2 5倍 ,峰值波长蓝移 33nm。分析了现象发生的原因是由于多孔硅表面的SiHx 中的H被Ni替换成SiNix 的结果。更多还原

【Abstract】 A new method for electrolysis passivation treatment of porous silicom (PS) in NiCl 2 is reported in this paper.The photoluminescence (PL) spectra of PS treated in different time is observed,the spectra show that peak intensity is 2 5 times stronger than that without treatment,peak wavelength is 33 nm blue shift when PS is treated properly.The phenomenon caused is that the results of the SiH x change into SiNi x when replaced H by Ni on surface of PS.更多还原