【摘要】 采用 MOD方法制得了具有纯钙钛矿结构和良好铁电性能的 PZT薄膜 ,典型 Pr、Ps、Ec值分别为 2 7μC/ cm2、4 4 μC/ cm2、10 .9k V/ mm,进一步分析表明 ,制备工艺对薄膜的析晶状态、晶粒尺寸和铁电性能有重大影响 ,析晶充分和大晶粒尺寸有利于获得较大的 Pr值更多还原

【Abstract】 The MOD method was employed to prepare PZT thin film with pure perovskite phase and good ferroelectric properties. The typical values of Pr、Ps、Ec were 27 μC/cm 2、44 μC/cm 2、10.9 kV/mm respectively. The further analysis indicated that sufficient crystallization and large grain size were benefical to obtain large P r values.更多还原