【摘要】 采用显微拉曼光谱研究了掺氮的类金刚石薄膜 ,该薄膜分别经过能量密度为 300, 750和 1500 W/mm2氩离子激光的退火处理。分析结果表明氮原子在类金刚石薄膜中形成了 C－ N键制 约了 C－ H键的形成。由于 C－ N键的键能比 C－ H键的键能大得多，因此在激光退火过程中 C－ N 键不易分解。所以随着氮含量的增加，类金刚石薄膜的激光退火后石墨化程度明显降低，具有比较 好的热稳定性。而非掺氮的类金刚石薄膜由于 C－ H键含量比较高，因此激光退火后容易石墨化。更多还原

【Abstract】 A Micro－ Raman spectrometer was used to study nitrogen doped amorphous hydrogenated carbon a－ C:H(N) films, annealed by a focused argon ion laser (514.5 nm) operating at power density of 300, 750 and 1500 W/mm2, respectively. During laser annealing, with the increasing of the power density, the peak ratio ID/IG of Raman spectra of an a－ C:H film without nitrogen in－ creases and the peak of graphite shifts from 1550 to 1598 cm－ 1, indicating that the film has graphi－ tized. However, with the increasing nitrogen content in a－ C:H(N) films, the graphitization is clearly restrained, indicating that the a－ C:H(N) films have higher thermal stability than that of a－ C:H films. A laser cold annealing (LCA) mechanism based on the bond excitation energy and thermody－ namics is adopted to interpret the results satisfactorily.更多还原