【摘要】 等离子体处理是微电子技术加工中一种成熟的工艺方法 ,引入射频辉光放电产生的低温等离子体对三乙醇胺涂膜 QCM（ Quartz Crystal Micro-balance）传感器进行表面处理 ,使传感器的各项性能得以改善。该方法给 QCM表面质量识别膜的修饰固定提供了新的思路。实验表明：处理后的传感器对乙醛有较好的选择性及较高的响应灵敏度。传感器的重现性与稳定性均佳，传感器较之涂膜处理前更易于再生且使用寿命大大增长。因而该传感器可用于气相中微量乙醛物质的探测，成本低，操作简单。本文对等离子体处理后性能改善的原因、传感器对有机物蒸汽的响应机理及传感器性能的影响因素等作了初步探讨。更多还原

【Abstract】 Plasma treatment is a kind of ripe microelectronics technology. Applying R.F. glow discharg-ing to process the surface of the Triethanolamine coating on the QCM (Quartz Crystal Microbalance) sensor, the QCM sensor’s performances are well ameliorated. Experiments indicate that the processed sensor has preferable sensitivity to aldehyde. The sensor has a series of virtues, such as good reappea-rance, short response time, stable performance, easier to regenerate and much longer lifetime. In this paper, we discuss preliminarily the response mechanism of the sensor, the causation of the amelio-rated characteristics and the factors that affect its performance.更多还原