【摘要】 氧化钒薄膜及其在微电子和光电子领域中的应用已成为国际上新颖功能材料研究的热点之一。本文综述了V2 O5和VO2 薄膜电学性能与薄膜组分和结构的相关性 ,比较了不同工艺制备的氧化钒薄膜的电学性能差异更多还原

【Abstract】 There has been a lot of interest in vanadium oxides thin films because of their extensive applications in microelectronics and optoelectronics. Relativity between structures and electrical properties was summarized, meanwhile differences among properties of VO 2 and V 2O 5 films prepared on a variety of substrates by different methods are analyzed.更多还原