【摘要】 针对当前应用较为广泛的各种薄膜厚度测控技术，简明介绍了光电极值法、干 涉法、石英晶体振荡法及椭偏仪法的物理原理及其应用．更多还原

【Abstract】 In accordance with many measurement and controlling technologies of thin film thickness which are widespreadly used today, four physics principles and their uses including photoelectic maximum method, interferential method, quartz crystal oscillating method and ellipsometry are introduced simply.更多还原