【摘要】 分析了透射率极值监控系统的精度与被监控膜层的光学厚度误差之间的关系 ,推导了在不同情况下薄膜淀积时 ,监控者对于透射率极值点的判定误差和被镀层的光学厚度误差之间的关系式 ,对规整膜系在透射率极值法监控镀膜系统中的淀积结果进行了电脑仿真。仿真结果与实验结果相吻。更多还原

【Abstract】 The relations between the precision of the transmittance turning point monitoring system and the thickness error of the monitored layer are analyzed.It is derived that the functions of the optical thickness error of each layer and the error judgement with the turning point by monitor while coating is deposited under different monitoring cases.It has been simulated that the final structure of the deposited coating which monitored by the transmission turning point monitoring approach.The simulated thichness values of each layer after deposition is composed of two parts:One of them is the thickness value correspond to the transmittance extreme searched by one dimensional search,the other is the random thickness error cause by the monitoring approach.The computer simulation is agreement with experimental results.更多还原