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焦磷酸质子交换LiNbO₃光波导制备技术研究

Study on Technology of Proton-exchanged LiNbO₃ Waveguides Fabricated Using H₄P₂0₇

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【Author】 Liang Dongbo ,Tang Jie ,Iso Mamoru, Chen Lin, Yuan Yifang, Chen Baoxue (College of Optics and Electron Information Engineering, Shanghai University of Science and Technology Shanghai 200093 (Department of Chemical Engineering, Tokyo University of Agricult

【机构】上海理工大学光学与电子信息工程学院；日本东京农工大学工学院应用化学系；上海理工大学光学与电子信息工程学院上海 200093；上海 200093；日本东京；

【摘要】采用焦磷酸质子交换技术制备ＬｉＮｂＯ３光波导，总结了交换条件、退火工艺和波导特性的实验结果，报告了表面腐蚀情况和单模条件。测量分析了退火前后波导折射率分布的变化，采用循环迭代法拟合折射率分布。结果显示退火前后的折射率分别呈近似阶梯和近似指数的分布，均可用费米函数良好地描述。更多还原

【Abstract】 Properties of proton-exchanged optical planar waveguides in x- cut LiNbO3 fabri-cated using H4P207 are studied. Exchange conditions and annealing properties are discussed with experimental data. The result shows that the graded-index of waveguides changed from a step function to an exponential shape after annealing, and its profiles can be recovered using the Fermi function from measured mode indices.更多还原