【摘要】 采用磁控射频溅射法制备了用作光波导器件的玻璃薄膜。通过选取不同的溅射材料，在不同溅射条件下制备的玻璃薄膜的光学参数进行的测量、比较，并对其作为光波导的性能进行研究，通过理论上推导与计算，得出了在１，５５ｕｍ窗口下制备光波导器件的玻璃薄膜所应具备的溅射条件。更多还原

【Abstract】 In this paper, the glass thin film waveguides is deposited by the reaction magnetron sputtering’ We measure and compare the optical parameter of glass thin film made by different sputtering material under different conditions. We research the waveguides capa- bility of the thin film. We educe the condition which should be provided with to deposit waveguides glass thin film in the window of 1.55 um.更多还原