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STM在大气下的电场加工作用研究

Study of electric field fabrication based on STM in air

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【作者】 胡晓东于静刘庆纲胡小唐

【Author】 HU Xiao dong,YU Jing,LIU Qing gang,HU Xiao tang (National Key Lab of Precision Measuring Techniques and Instruments,Tianjin University,Tianjin 300072,China.)

【机构】 天津大学精密测试技术及仪器国家重点实验室天津大学精密测试技术及仪器国家重点实验室 天津300072天津300072天津300072

【摘要】 阐述了大气状态下STM在Au和Ti表面的电场加工实验 ,实时监测了实验中探针和样品间的电流变化。通过对实验结果的分析和研究 ,相应的作用机理确定为电场诱导的接触和化学反应。当在探针 样品之间施加电脉冲时 ,Au和Ti表面上纳米点结构的形成显示出相似的特征 ,一是点结构的形成具有随机性 ,二是只有在探针和样品之间的电流发生极大的波动时才能产生可分辨的点结构。在Au和Ti表面分别施加渐变电压时 ,Au表面将不会形成点结构 ,而在Ti表面则生成形状大小与电压幅值成正比的坑状结构。另外 ,证实了相对湿度对电场诱导化学反应的影响

【Abstract】 Experiments of the nanofabrication on Au and Ti surfaces by scanning tunneling microscope (STM) were carried out in air, and the current between the tip and sample was monitored. The modification mechanisms were analyzed,and a contact between the tip and sample and oxidation were testified. During a voltage pulse with a duration from 1μs to 100μs, the characteristics of the formation of nanostructure and change of the current on Au were similar to that on Ti surface. The similarity is that the nano dots on the surface can only be fabricated when the current has a great fluctuation, and the nano dots are created at random. When the gradual changed voltage was applied on Au and Ti surfaces respectively, the modification doesn’t happen on Au surface and the delves were created on Ti surface. Moreover, the results testify that the relative humidity played an important role during the formation of nanostructure.

【关键词】 STM纳米加工大气状态
【Key words】 STMnanofabricationatmosphere
  • 【文献出处】 电子显微学报 ,Journal of Chinese Electron Microscopy Society , 编辑部邮箱 ,2001年05期
  • 【分类号】TG174.37
  • 【被引频次】2
  • 【下载频次】50
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