【摘要】 本文采用宽束曲轴电子光学理论 ,研究了磁浸没透镜的电子光学特性 ,得出了主轨迹方程和曲近轴轨迹方程 ,并利用数学软件Mathematica推导出了其全部二级像差系数 .针对轴上磁场分布具有解析表达式的磁浸没透镜 ,文中还计算了它的曲轴二级像差 ,并给出了其孔径像差的弥散图形情况 ,从而得出了磁浸没透镜的特殊的电子光学像差特性更多还原

【Abstract】 Electron optical properties of magnetic immersed lenses are studied using curved axes theory with wide beam.Principal trajectory equations and paraxial trajectory equations are obtained and all of second order aberration coefficients are derived by Mathematica.The second order curved axes aberration of a magnetic immersed lens which has analytic axial field distribution is calculated and a dispersion graph of aperture aberration is also given.It is shown that aberration characteristic of immersed magnetic lenses is very particular.更多还原