【摘要】 微波耦合效率 (Pi-Pr) /Pi 是微波离子源的重要参数 ,它与磁场强度和分布关系密切 .通过对比实验研究了不同等离子体离子腔尺寸、不同引入窗厚度时对微波耦合效率的影响 ,当离子腔尺寸为 1 0 0mm ,窗厚度为 3 0mm时 ,耦合效率为 1 0 0 % (磁场分布在最佳模式 ) .此外还研究了耦合效率与真空度的关系 ,通过二极多孔引出电极引出系统引出离子 ,其引出电压为 1 8kV ,引出束流为 3 0mA .更多还原

【Abstract】 Microwave coupling efficiency is an important parameter for microwave ion source, and has close relation with magnetic field strength and it’s distribution. This paper argues the influence of different plasma chamber size and different introducing windows thickness to the microwave coupling efficiency. The microwave coupling efficiency is 100% when the plasma chamber is 100 mm long and the microwave windows is 30 mm thick (the distribution of magnetic field is in the prime mode). The relationship between microwave coupling and pressure is also argued in this paper.更多还原