【摘要】 采用新型等离子体浸没式离子注入技术，对Ｔｉ６Ａｌ４Ｖ合金进行氮离子注入．对注入层的成分、组织和性能的分析表明，注入层中氮浓度的分布具有类高斯分布特征，在注入层中有ＴｉＮ和非晶态相形成．注入层的显微硬度和摩擦性能得到了明显的改善．更多还原

【Abstract】 A new plasma immersion ion implantation technique was used for modification of Ti6A14V alloy with nitrogen ions. The concentration, microstructure and properties of the implanted layers were analyzed. The results showed that the distribution of the nitrogen concentration in the implanted layers has the like Gauss, titanium nitride and amorphous phase have formed in the implanted layers. and the microhardness and tribological properties are improved obviously.更多还原