【摘要】 以Ｔｅｆｌｏｎ ＡＦ １６００为原料，用旋涂法制备了非晶含氟聚合物（ＡＦ）薄膜．通过扫描电镜（ＳＥＭ）、傅立叶转换红外（ＦＴＩＲ）光谱和Ｘ射线光电子（ＸＰＳ）光谱等手段对热退火前后的薄膜进行了表征所得薄膜具有无针孔，较光滑和平整的表面，３００℃退火后薄膜表面的均匀性进一步改善。ＡＦ薄膜在３００℃以下具有良好的热稳定性，在４００℃退火后ＣＦ３吸收峰强度稍有降低。在４００Ｃ退火后，其所含的ＣＦ３键合构型显著降低，ＣＦ２、ＣＦ等其它构型没有明显的变化，由于ＣＦ３基团的分解有少量无定型碳生成．更多还原

【Abstract】 Amorphous fluoropolymer films were prepared by using Teflon AF 1600 as raw material and spin-on method. The films were characterized by scan electric mirror (SEM), Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectrum (XPS). SEM photographs showed that the obtained films had no-pinhole and relative smooth and flat surfaces, and the uniformity of the film, improved further after annealing at 300℃. According to FTIR spectra of the films heated at different temperatures, it could be found that AF film had excellent thermal stability below 300℃, and for the film heated at 400℃ the intensity of CF3 adsorption peak decreased slightly. XPS indicated that CF3 bonding configurations in AF film annealed at 400℃ decreased remarkably and CF2, CF etc. bonding configurations didn’t show obvious changes. Meanwhile, a little amorphous carbon may be formed due to decomposition of CF3 groups.更多还原