【摘要】 根据实验观察分析提出了金刚石二次形核机制 ,此机制认为二次形核很容易在( 10 0 )晶面上和晶界上形成。通过比较 ( 10 0 )面的二次形核和形成新生长台阶的系统自由能差 ,可知当气氛中的碳氢基团浓度较大时 ,粘附在基底的碳氢基团发生堆集 ,如果堆集碳氢基团高度尺寸较大时将形成二次晶核。也对晶界二次形核的系统自由能差进行了推导 ,结果表明晶界二次形核是自发的 ,将导致体系自由能的下降。更多还原

【Abstract】 We describe a sceond nucleation mechanism of CVD diamond films according to experimental observations, which indicates second nucleations are opt to form at crystal boundaries and (100) faces.Free energy of a second nucleation contrasted with that of Forming a new growth step,it is showed that when carbon\|hydrogen radical concentration is higher,carbon\|hydrogen radical on substrate will heap up, at this time a second nucleation can form.Free energy of a second nucleation forming on crystal boundary is also calculated,which shows a second nucleation on crystal bonudary is spontaneous and it causes system free energy decrease.\;更多还原