【摘要】 电容式微加速度计的噪声包括机械热噪声和电热噪声 ;主要分析了机械热噪声在开环系统和闭环系统中的噪声特性以及开环系统和闭环系统检测的动态范围 ,提出电容式微加速度计的噪声主要由机械热噪声的大小决定 ;同时 ,机械热噪声的大小又主要取决于温度和机械阻尼的大小更多还原

【Abstract】 The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;mostly analysis the noise behavior of mechanical thermal noise in the open loop system and close loop system,along with the dynamic range of the open loop system and close loop system,the noise of capacitive micro accelerometer is dominated by the magnitude of mechnical thermal noise;at the same time,the magnitude of mechnical thermal noise depends on temperature and the magnitude of mechanical damping.更多还原