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石英谐振式CO₂气敏元件

Fabrication of quartz resonance CO₂ gas sensor

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【Author】 ZHAO Ben gang 1, CHEN Li hua 1, BAI Xu dong 2, ZHANG Gang 3, QUAN Bao fu 1 (1.Dept. of Electronic, jilin University,Changchun 130023, China; 2.Dept. of Phys.,jilin University, Changchun 130023,China; 3.Dept. of Chem.,jilin University, Changchu

【机构】吉林大学电子工程系；吉林大学物理系；吉林大学化学系；吉林大学电子工程系吉林长春130023；吉林长春130023；吉林长春130023；

【摘要】以聚乙烯亚胺 (PEI)为敏感涂层 ,制作了石英谐振式气敏元件。研究结果表明 ,该元件对CO2具有较高的灵敏度和较好的选择性及快速的响应恢复特性更多还原

【Abstract】 Poly ethylene imine(PEI)is regarded as sensitive coating in the experiment, and the quartz resonance gas sensor is fabricated. As showed from the result of the experiment, this gas sensor has high sensitivity and good selectivity, and its respondence time and recovery time is short, too.更多还原