节点文献
微机械电容式压力传感器的变换电路
Converting circuit for micromechanical differential capacitive pressure sensors
【摘要】 在介绍一种新型微机械差动电容式压力传感器的基础上 ,重点介绍一种为其配套的电容—电压变换电路。并以实验结果反映其电路的优点
【Abstract】 A kind of capacitance to voltage converting circuit designed for a new-type micromechanical differential capacitive pressure sensor is described in detail on the basis of introducing the new-type pressure sensor.The experimental data have been shown to testify the advantage of the circuit.
【关键词】 微机械;
差动电容;
电容电压;
变换电路;
【Key words】 micromechanical; differential capacitance; capacitive voltage; converting circuit;
【Key words】 micromechanical; differential capacitance; capacitive voltage; converting circuit;
【基金】 国家“九五”重点科技攻关项目! (96-748-0 2 -0 1/10
- 【文献出处】 传感器技术 ,Journal of Transducer Technology , 编辑部邮箱 ,2001年03期
- 【分类号】TP212
- 【被引频次】6
- 【下载频次】159