【摘要】 利用微电子机械加工技术成功地研制出电热激励、压阻拾振的高精度硅谐振梁式压力传感器。传感器的谐振器的品质因素Q值在真空中大于 10 0 0 0。采用特殊闭环自激振荡方式测定压力传感器的压力特性 ,压力测试范围 0～ 40 0kPa ,线性相关系数 0 .9999,测试精度优于 0 .1%FS。更多还原

【Abstract】 A thermally excited and piezo-resistor detected silicon resonant pressure sensor of high accuracy has been developed by microelectronic mechanical system(MEMS) technology. The resonator of the sensor has a high quality factor of more than 10000 in vacuum. With a special close-loop self-excited method, the pressure sensor is characterized. The sensitivity is 12.2*#Hz/kPa over a range of 0～ 400*#kPa with a linear correlation coefficient of 0.999*#9. The overall accuracy is better than 0.1%.更多还原