【摘要】 研制了一种无触点的十字形两维集成垂直霍尔器件 ,它对平行于芯片表面的磁场敏感。当与被测转角θ的物件轴向相连的径向永久磁铁转动时 ,传感器给出了相对于被测角度的两种信号电压 ,通过接口电路和PC机组成的非接触式测量系统把信号转换为转角θ。测试结果表明该角度传感器及其测量系统的测量精度在 0°～ 36 0°范围内可达± 1°更多还原

【Abstract】 A new contactless two-dimensional integrated Hall angular sensor is presented.A radial permanent magnet is attached to the axis whose angle position θ is to be determined.  Two orthogonal vertical Hall devices in cross shape measure the magnetic field X,Y compornents paralled to the chip surface and therefore the angular position θ of the axis.  When the permanent magnet rotates, the measured output voltages V x,V y by the two pairs of vertical Hall plates change correspondingly. The angle θ could be obtained by calculating the arc tangent of the signal ratio V x/V y through the interface circuit and PC processor. The experimental results show the whole angular mearement system has the angular measurement accuracy of ±1° over a full 360° operating range.更多还原