【摘要】 介绍了当今深受关注的等离子聚合薄膜的制备技术。其中 ,重点探讨了在低能通量和高能通量条件下制备等离子聚合物的沉积过程、膜的结构形态及主要性能 ,并对近来人们在中等能量通量下制备的等离子聚合体的研究情况做了简要描述。与此同时 ,还就各种不同等离子聚合薄膜的实际应用及发展前景进行了概括更多还原

【Abstract】 A review is given on the application of tow groups of plasma polymers films.Plasma polymer films skill and their application are summarized in this article.First,hard plasma polymer(C:H)composites by unbalanced magnetron sputtering developed,deposition process and basic properties such as the structure,morphology,electrical and optical properties are described. Then,the preparation of plasma polymer films by radio-frequency sputtering from polymeric targets is introduced.更多还原