【摘要】 采用 XPS对 Ti N- Mo Sx/Ti复合膜表面 S被 Ar+ 大量刻蚀后化学组成及摩擦学性能的变化机理进行了研究 .长时间离子轰击后复合膜表层的化学计量值 x从最初的 2 .0 3降至 1.2 5 ,Mo3d5/ 2 的结合能从 2 31.73e V相应减小到 2 31.0 7e V.刻蚀 5 min后的涂层表面为深黑色的致密结构 ,摩擦学性能优异 ;而刻蚀 15 min后的涂层表面为浅灰色的疏松结构 ,且摩擦磨损性能也大幅下降更多还原

【Abstract】 The changes of chemical components and tribological properties of TiN MoS x /Ti composite coatings caused by largely ion etching S from its surface are studied by XPS. After long time ion etching, the surface Mo/S ratio of the composite coatings decreases from 2 03 to 1 25 with a concomitant reduction in the Mo 3d 5/2 binding energy from 231 73 eV to 231 07 eV. After 5 minutes ion etching, the surface of coatings presents a deep black colored compact structure with excellent tribological properties; but after 15 minutes ion etching, the surface of the coating presents a french grey colored loose structure with greatly decreased tribological properties.更多还原