【摘要】 利用光电流谱 ,结合 X射线双晶衍射研究了快速退火对 Si1 - x Gex/ Si多量子阱 p- i- n光电二极管的影响 .由于应变 Si Ge的部分弛豫和 Si- Ge互扩散 ,退火后的二极管的截止波长有显著的减小 .但是 ,在 75 0— 85 0℃范围内 ,波长蓝移量随着退火温度的增加而变化缓慢 ,而样品的光电流强度却随温度是先减弱而后又增强 ,这可能主要是由于在不同温度退火过程中失配位错的产生和点缺陷的减小造成的 .更多还原

【Abstract】 The influence of thermal treatment on Si 1-x Ge x/Si multiple-quantum wells (MQW) p-i-n photodiodes has been investigated by photocurrent spectroscopy combined with X-ray double crystal diffraction.The cutoff wavelength is significantly reduced due to the Si-Ge interdiffusion and partial relaxation of the strained SiGe alloy.The values of the blue shift increase slowly with the annealing temperatures in the range of 750℃ to 850℃.However,the nonlinear changes in photocurrent intensities of the samples annealed at different temperatures have been observed,which is mainly dominated by the generation of misfit dislocations and the reduction of the point defects in the heating process.更多还原