【摘要】 通过实验确定了一种与 Gex Si1 - x合金表面具有良好电化学界面的电解液 ,利用电化学 C- V方法研究了多层Gex Si1 - x/ Si异质外延材料的载流子浓度纵向分布 .实验结果表明 :采用这种电解液 ,利用电化学 C- V载流子浓度纵向分布测量仪检测 Gex Si1 - x/ Si异质材料的载流子浓度纵向分布 ,重复性好 ,可靠性高更多还原

【Abstract】 A new kind of electrolyte, NH 4F·HF+HCl, with a good electrochemical interface between it and the surface of Ge x Si 1-x alloy has been determined experimentally.With this kind of electrolyte,the vertical distribution of carriers in Ge x Si 1-x multiple hetero epilayers can be measured using an electrochemical C V profiler,which has been proved by the results to be of quite good reproducibility and reliability.更多还原