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GaAs单晶阈值电压自动测试系统的研究
Study on the auto-test system of GaAs threshold voltage
【摘要】 根据GaAs阈值电压的测试原理,选取了一种比较精确的实验测试计算方法。在此基础上,分别设计了GaAs 单晶阈值电压均匀件自动测试系统的硬件电路和软件程序,并利用此系统对GaAs样品进行了实际测量,效果良好。
【Abstract】 According to the defining formula of GaAs threshold voltage, a kind of more accurate testing and calculating method is selected. We design the hardware and software of the auto-test system of the uniformity of GaAs threshold voltage based on that method. Finally, we measure the GaAs sample by the auto-test system, the effect is very good.
- 【文献出处】 半导体技术 ,Semiconductor Technology , 编辑部邮箱 ,2001年11期
- 【分类号】TN406
- 【下载频次】42