【摘要】 用直流等离子喷射法 ,以甲烷、氢和氩气的混合气体为原料 ,在钼基体上合成了较高质量的CVD金刚石薄膜。对该薄膜的生长面及其背面的晶粒尺寸进行了研究 ,指出其一般规律 ,进一步探讨了CVD金刚石薄膜的晶粒尺寸对其热导率的影响规律。更多还原

【Abstract】 CVD diamond films made from methane-hydrogen-argon gas mixture have been synthesized on molybdenum substrate by direct current plasma jet apparatus. The grain size of the diamond films (including growth surface and bottom) have been studied and their general laws are pointed out. Then the effect of the grain size of the CVD diamond films on their thermal conductivity has also been discussed.更多还原