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In2o3热线型乙醇气敏元件研究
Research of hotwire-type In2O3 alcohol gas sensor
【摘要】 在纯度为99.998%的超微细粉体In2O3中,掺入适当配比的PtO2,MgO,CaO 等金属氧化物构成气敏材料,用Pt丝作热敏材料,采用热线型元件制作工艺,700 ℃烧结1 h,可制作出乙醇气敏元件.测试表明:该元件灵敏度高,响应恢复快,功耗低(≤200 mW) ,对汽油、烟雾等其他干扰气体有良好的选择性.
【Abstract】 The gas sensor materials are obtained through doping 4%~10% PtO2, MgO and C aO etc. into the N type semiconductor material of ultra tiny powder In2O3 wi th the degree of purity is 99.998%. Hotwire-type fabricating is made at the opt imum 700 ℃ temperature with Pt wire as the heating sensor materials. The result s show that the sensor has the characteristics of high alcohol sensitivity, shor t initial stable time, short resuming time, low power dissipation(≤200 mW),the most prominent selectivity, low sensitivity to disturbing gases such as petrol and smoke.
【Key words】 indium oxide; ethanol sensitivity; gas sensitive devices; sinterinh;
- 【文献出处】 郑州轻工业学院学报 ,Journal of Zhengzhou Institute of Light Industry , 编辑部邮箱 ,2000年04期
- 【被引频次】6
- 【下载频次】69