【摘要】 采用大直径中空柱状阴极磁控溅射装置和筒形加热器制备了高质量YBa2 Cu3O7-x双面超导薄膜。使用衬底为 (0 0 1)LaAlO3和 (0 0 1)YSZ。双面超导薄膜零电阻温度TC=89～ 91K ,临界电流密度JC≥ 10 6A/cm2 (77K ,零场下 ) ,微波表面电阻RS<1mΩ(77K ,10GHz)。对不同氧氩比下制备的双面膜进行了性能的比较。当O2 ∶Ar =1∶2 .5 ,衬底温度在80 0℃时 ,制备出了高质量的双面超导薄膜。同时对双面超导薄膜进行了微结构分析。用制备的 2 5mm× 2 0mm双面膜研制成功中频滤波器 ,中心频率为 1 0 6GHz时 ,插损为 0 6 7dB。更多还原

【Abstract】 High quality of double sided YBa 2Cu 3O 7- x superconducting films deposited on (001) LaAlO 3 and (001) YSZ substrates were prepared by inverted cylindrical magnetron sputtering with a radiation heater. The properties of the double sided superconducting films are as following, T C≥90K, J C≥10 6 A/cm 2 at 77K and 0T and microwave surface resistance R S<1 mΩ at 77K and 10GHz. High quality superconducting films of two sides can be acquired with O 2∶Ar=1∶2.5 and substrate temperature of 800℃. Microstructure analysis to the double sided superconducting films was also performed. For the middle frequency filter prepared by 25mm×20 mm double sided films,the insertion loss is in order of 0.67 dB when the frequency of its center is 1.06 GHz.更多还原